Monolithic two-dimensional surface-emitting laser diode arrays with 45 degree micromirrors

Michael Jansen; Jane J. Yang; Szutsun Simon Ou; Moshe Sergant; Luke J. Mawst; John Rozenbergs; Jaroslava Z. Wilcox; Dan Botez

doi:10.1117/12.43792

1 July 1991 Monolithic two-dimensional surface-emitting laser diode arrays with 45 degree micromirrors

Michael Jansen, Jane J. Yang, Szutsun Simon Ou, Moshe Sergant, Luke J. Mawst, John Rozenbergs, Jaroslava Z. Wilcox, Dan Botez

Author Affiliations +

Proceedings Volume 1418, Laser Diode Technology and Applications III; (1991) https://doi.org/10.1117/12.43792
Event: Optics, Electro-Optics, and Laser Applications in Science and Engineering, 1991, Los Angeles, CA, United States

Abstract

Development and performance of large area (0.5 cm2) junction-down monolithic two- dimensional surface-emitting arrays is reported. This involves fabrication of 45 degree(s) and vertical micromirrors with +/- 2 degree(s) tolerances and < 0.2 RMS smoothness, lapping and polishing of 2 in. diameter wafers with < 10 micrometers thickness tolerances, integration of 100 micrometers thick current spreading electrodes which minimize ohmic losses, large area packaging, and mounting to heat exchangers for long pulse operation and minimum chirp. Single monolithic surface emitter diodes exhibit superior performance (slope efficiencies of (eta) d > 50%, threshold currents of Ith equals 220 mA, and output powers in excess of 720 mW). This projects to power densities > 860 W/cm2 and > 50% differential slope efficiencies for arrays of devices. Large area array operation (scaling) was demonstrated. Uniform lasing was achieved from 0.2 cm X 0.5 cm and 0.5 cm X 1.0 cm active area junction-down monolithic arrays (120 and 600 emitters respectively) using 100 microsecond(s) ec long pulses at a 1% duty cycle. Differential slope efficiencies of > 40% were achieved for rows of 12 emitters, and 8% for the large area arrays. The drop in efficiency was due to current leakage, which limited the output power densities to 150 W/cm2. Chirp in these devices was measured to be < 4 nm at twice the threshold current.

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Michael Jansen, Jane J. Yang, Szutsun Simon Ou, Moshe Sergant, Luke J. Mawst, John Rozenbergs, Jaroslava Z. Wilcox, and Dan Botez "Monolithic two-dimensional surface-emitting laser diode arrays with 45 degree micromirrors", Proc. SPIE 1418, Laser Diode Technology and Applications III, (1 July 1991); https://doi.org/10.1117/12.43792

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