Automated damage testing facility for excimer laser optics

K. Mann

doi:10.1117/12.2294414

1 November 1990 Automated damage testing facility for excimer laser optics

K. Mann

Author Affiliations +

Proceedings Volume 1438, Laser-Induced Damage in Optical Materials 1989; 143805 (1990) https://doi.org/10.1117/12.2294414
Event: Laser-Induced Damage in Optical Materials 1989, 1989, Boulder, CO, United States

Abstract

A set-up for automated measurement of damage thresholds on UV optical components is presented, being part of the EUREKA program "High Power Excimer Lasers". It includes on-line monitoring of probe beam parameters as well as sample condition, using digital image processing techniques for both laser beam profiling and high sensitivity damage detection. The latter is performed with a video microscopy system by pixel-to-pixel comparison of the video frames taken before and after the test laser pulse.

Citation Download Citation

K. Mann "Automated damage testing facility for excimer laser optics", Proc. SPIE 1438, Laser-Induced Damage in Optical Materials 1989, 143805 (1 November 1990); https://doi.org/10.1117/12.2294414

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