Effect of operating points in submicron CD measurements

Mircea V. Dusa; Christoph Jung; Paul Jung; Detlef Hogenkamp; Klaus-Dieter Roeth

doi:10.1117/12.44457

1 July 1991 Effect of operating points in submicron CD measurements

Mircea V. Dusa, Christoph Jung, Paul Jung, Detlef Hogenkamp, Klaus-Dieter Roeth

Proceedings Volume 1464, Integrated Circuit Metrology, Inspection, and Process Control V; (1991) https://doi.org/10.1117/12.44457
Event: Microlithography, 1991, San Jose, CA, United States

Abstract

A new measuring method was developed to optimize the submicron CD measurements with a conventional optical microscope system. An optimum combination of the inspection system optical parameters is used to accurately and precisely measure each feature of interest. Such combinations are considered to define the 'operating points' for the new measuring method. Also, the slope of the logarithm of the image intensity profile was determined to be an appropriate metric of aerial image quality in order to predict the operating points number and their placement. This paper discusses the experimental results obtained in measuring 0.75 micrometers isolated spaces with the proposed method and the construction of the operating points for this feature, with the measured linewidth data.

Citation Download Citation

Mircea V. Dusa, Christoph Jung, Paul Jung, Detlef Hogenkamp, and Klaus-Dieter Roeth "Effect of operating points in submicron CD measurements", Proc. SPIE 1464, Integrated Circuit Metrology, Inspection, and Process Control V, (1 July 1991); https://doi.org/10.1117/12.44457

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available