Using an expert system to interface mainframe computing resources with an interactive video system

Raymond Carey; Sheryl F. Wible; Wayne H. Gaynor; Timothy G. Hendry

doi:10.1117/12.44461

1 July 1991 Using an expert system to interface mainframe computing resources with an interactive video system

Raymond Carey, Sheryl F. Wible, Wayne H. Gaynor, Timothy G. Hendry

Proceedings Volume 1464, Integrated Circuit Metrology, Inspection, and Process Control V; (1991) https://doi.org/10.1117/12.44461
Event: Microlithography, 1991, San Jose, CA, United States

Abstract

An expert system called SEIB (sustaining-engineer-in-a-box) has been developed to allow routine lithography troubleshooting to be performed by manufacturing personnel, reducing their dependence on sustaining engineers. SEIB is a multi-media, multi-interface expert system, capable of utilizing interactive video images, PC-based information, and database information contained within a mainframe computer-aided manufacturing (CAM) system. SEIB utilizes a custom expert system contained within a DVIR interactive video platform. This allows for quick resolution of problems without engineering intervention. Because of its design, the system can be easily adapted to any functional area in the fabrication facility.

Citation Download Citation

Raymond Carey, Sheryl F. Wible, Wayne H. Gaynor, and Timothy G. Hendry "Using an expert system to interface mainframe computing resources with an interactive video system", Proc. SPIE 1464, Integrated Circuit Metrology, Inspection, and Process Control V, (1 July 1991); https://doi.org/10.1117/12.44461

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