Acid-catalyzed pinacol rearrangement: chemically amplified reverse polarity change

Ratnam Sooriyakumaran; Hiroshi Ito; Eugene A. Mash

doi:10.1117/12.46390

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1 June 1991 Acid-catalyzed pinacol rearrangement: chemically amplified reverse polarity change

Ratnam Sooriyakumaran, Hiroshi Ito, Eugene A. Mash

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Proceedings Volume 1466, Advances in Resist Technology and Processing VIII; (1991) https://doi.org/10.1117/12.46390
Event: Microlithography, 1991, San Jose, CA, United States

Abstract

The reverse polarity change from a polar to a nonpolar state has been successfully incorporated in the design of chemical amplification resists. The imaging mechanism is based on the pinacol-pinacolone rearrangement, wherein vic-diols (pinacols) are converted to ketones or aldehydes with photochemically generated acid as a catalyst. In addition to a polymeric pinacol which undergoes the rearrangement very cleanly in the solid state, aqueous base developable three-component negative deep UV resist systems are described, which are based on phenolic resins, small pinacols, and triphenylsulfonium hexafluoroantimonate as the acid generator.

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Ratnam Sooriyakumaran, Hiroshi Ito, and Eugene A. Mash "Acid-catalyzed pinacol rearrangement: chemically amplified reverse polarity change", Proc. SPIE 1466, Advances in Resist Technology and Processing VIII, (1 June 1991); https://doi.org/10.1117/12.46390

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