Microstructure of titanium oxide thin films

Rui-Ying Fan; Yue Mei Lu; Xiangyun Song

doi:10.1117/12.47278

1 November 1991 Microstructure of titanium oxide thin films

Rui-Ying Fan, Yue Mei Lu, Xiangyun Song

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47278
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

Reported here are the TEM studies about the microstructures of TiO₂ and Ti₃O₅ thin films thermally annealed at different temperatures and the microstructure change of TiO₂ thin films before and after the laser-induced damage. Cross sectional TEM images of IAD deposited TiO₂ singlelayer and TiO₂/SiO₂ multilayers are also observed and analyzed.

Citation Download Citation

Rui-Ying Fan, Yue Mei Lu, and Xiangyun Song "Microstructure of titanium oxide thin films", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47278

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