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1 November 1991 New coating technology and ion source
Yi Sin Yan
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Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47254
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China
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© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Yi Sin Yan "New coating technology and ion source", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47254
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KEYWORDS
Ions
Coating
Electrons
Thin films
Beam splitters
Glasses
Plating
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