Preparation of superconducting Y-Ba-Cu-O thin films by rf magnetron sputtering

Zong Tan Huang; Guozhen Li; Guangli Zeng; Jiang Ping Huang; Guilan Xiong

doi:10.1117/12.47237

1 November 1991 Preparation of superconducting Y-Ba-Cu-O thin films by rf magnetron sputtering

Zong Tan Huang, Guozhen Li, Guangli Zeng, Jiang Ping Huang, Guilan Xiong

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47237
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

Since the discovery of high Tc superconducting oxides, including YBa₂Cu₃O_x, thin films of these material have been paid much attention due to their application potential in electronic devices. Several techniques have been employed to prepare superconducting thin films. Among them, sputtering technique using a single oxide target is one of the simplest and most useful methods. For our purpose, which is using superconducting thin films in some electronic devices, sputtering technique is presumably the best method for the deposition of thin films because of its controllability of film thickness, surface smoothness, homogeneity in quality, and tight sticking to the substrate and other layers. In this work, the authors have attempted to deposit YBa₂Cu₃O_x superconducting thin films by rf magnetron sputtering technique and tried to use them in some electronic devices.

Citation Download Citation

Zong Tan Huang, Guozhen Li, Guangli Zeng, Jiang Ping Huang, and Guilan Xiong "Preparation of superconducting Y-Ba-Cu-O thin films by rf magnetron sputtering", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47237

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