Soft X-UV silver silicon multilayer mirrors

Jian-Da Shao; Zhengxiu Fan; Yong Hong Guo; Lei Jin

doi:10.1117/12.47258

1 November 1991 Soft X-UV silver silicon multilayer mirrors

Jian-Da Shao, Zhengxiu Fan, Yong Hong Guo, Lei Jin

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47258
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

In the soft x-ray domain (near 10 nm), the reported optical constants of silver and silicon are sufficiently different to make them attractive for a multilayer design. In this paper, design and fabrication of silver/silicon multilayer to be used as normal-incidence reflectors for 11.4 nm radiation are presented. Characterization of these multilayer structures was accomplished using Auger electron spectroscopy (AES) and little-angle x-ray diffraction (LXD). As a result of our experiments, we came to realize that silver/silicon multilayer can provide high quality structures and reach a certain reflectance.

Citation Download Citation

Jian-Da Shao, Zhengxiu Fan, Yong Hong Guo, and Lei Jin "Soft X-UV silver silicon multilayer mirrors", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47258

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available