Properties of spray pyrolysed SnO2:Sb films

A. Arulgnanam; S. Balachandran; A. Balasubramanian

doi:10.1117/12.57036

1 February 1992 Properties of spray pyrolysed SnO₂:Sb films

A. Arulgnanam, S. Balachandran, A. Balasubramanian

Proceedings Volume 1523, Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits; (1992) https://doi.org/10.1117/12.57036
Event: Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits, 1992, Madras, India

Abstract

Transparent conducting thin films of tin oxide, doped with antimony were prepared by spray pyrolytic process under controlled conditions on borosilicate glass substrates, using pentahydrate tin chloride (SnCl₄ .5H₂0) as the starting material. Variations in parameters such as, the substrate temperature T5 and post-deposition annealing temperature TA were studied. Electrical and optical properties and x-ray diffraction studies of these films were studied to characterize these films.

Citation Download Citation

A. Arulgnanam, S. Balachandran, and A. Balasubramanian "Properties of spray pyrolysed SnO₂:Sb films", Proc. SPIE 1523, Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits, (1 February 1992); https://doi.org/10.1117/12.57036

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available