Nd:YAG laser machining with multilevel resist kinoforms

Mats Ekberg; J. Michael Larsson; Aldo Bolle; Sverker Hard

doi:10.1117/12.48654

1 December 1991 Nd:YAG laser machining with multilevel resist kinoforms

Mats Ekberg, J. Michael Larsson, Aldo Bolle, Sverker Hard

Proceedings Volume 1527, Current Developments in Optical Design and Optical Engineering; (1991) https://doi.org/10.1117/12.48654
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Laser micromachining with ten level resist kinoforms, manufactured by electron-beam lithography, is presented. The kinoforms were shown to have a diffraction efficiency of 68%. One kinoform was used to drill nine diffraction-limited holes simultaneously in a 0.10 mm thick stainless-steel plate. Marking in a silicon wafer was also done.

Citation Download Citation

Mats Ekberg, J. Michael Larsson, Aldo Bolle, and Sverker Hard "Nd:YAG laser machining with multilevel resist kinoforms", Proc. SPIE 1527, Current Developments in Optical Design and Optical Engineering, (1 December 1991); https://doi.org/10.1117/12.48654

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available