Microprocessor-Based Automatic Heterodyne Interferometer

F. M. Mottier

doi:10.1117/12.938228

15 December 1978 Microprocessor-Based Automatic Heterodyne Interferometer

F. M. Mottier

Proceedings Volume 0153, Advances in Optical Metrology I; (1978) https://doi.org/10.1117/12.938228
Event: 22nd Annual Technical Symposium, 1978, San Diego, United States

Abstract

The interferometer described in this article combines a number of principles known for a long time in a system of unusual versatility. The operation modes range from classical interferometry for visual or photographic evaluation of apertures up to 150 mm diameter, to programmed scan heterodyne interferometry with fringe counting and to time and space resolved subfringe measurement with better than 10 nm resolution.

Citation Download Citation

F. M. Mottier "Microprocessor-Based Automatic Heterodyne Interferometer", Proc. SPIE 0153, Advances in Optical Metrology I, (15 December 1978); https://doi.org/10.1117/12.938228

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