Profile measurement of concave mirror by a common-path interferometer on ultraprecision machine

Kazuo Yoshikawa; Takashi Nomura; Hatsuzo Tashiro; Masane Suzuki; Masao Usuki; Fumio Kobayashi

doi:10.1117/12.134853

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1 January 1992 Profile measurement of concave mirror by a common-path interferometer on ultraprecision machine

Kazuo Yoshikawa, Takashi Nomura, Hatsuzo Tashiro, Masane Suzuki, Masao Usuki, Fumio Kobayashi

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Proceedings Volume 1531, Advanced Optical Manufacturing and Testing II; (1992) https://doi.org/10.1117/12.134853
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

This paper presents the technique of an on-machine precision profile measurement, through a kind of common-path interferometer using a zone-plate. We could analyze profile errors of a spherical mirror on the machine turning at a speed of 900 rpm. The results of experiments are evaluated.

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Kazuo Yoshikawa, Takashi Nomura, Hatsuzo Tashiro, Masane Suzuki, Masao Usuki, and Fumio Kobayashi "Profile measurement of concave mirror by a common-path interferometer on ultraprecision machine", Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); https://doi.org/10.1117/12.134853

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