Smooth diamond films by reactive ion-beam polishing

Bertrand G. Bovard; Tianji Zhao; H. Angus Macleod

doi:10.1117/12.48295

1 December 1991 Smooth diamond films by reactive ion-beam polishing

Bertrand G. Bovard, Tianji Zhao, H. Angus Macleod

Proceedings Volume 1534, Diamond Optics IV; (1991) https://doi.org/10.1117/12.48295
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Recent progress in ion beam polishing has successfully led to the production of smooth diamond films. By means of an oxygen ion beam, a 5 cm diameter, 1 micrometers rough film grown by microwave plasma chemical vapor deposition on silicon has been polished. The polished film root-mean-square and peak-to-valley roughness values averaged over 15 points are respectively 5.5 nm and 55.4 nm. Scattering has been decreased to the point where the polished film is transparent at wavelengths above the silicon absorption edge and shows interference fringes. This suggests that diamond films polished by this process can be used in optical applications. This paper describes the polishing technique and presents the results obtained by surface profilometry of the polished sample. The main advantages of ion beam polishing over other existing methods lie in the fact that it is noncontact and low-temperature technique.

Citation Download Citation

Bertrand G. Bovard, Tianji Zhao, and H. Angus Macleod "Smooth diamond films by reactive ion-beam polishing", Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); https://doi.org/10.1117/12.48295

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available