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1 November 1991 Performance and measurements of refractive microlens arrays
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Abstract
Refractive microlens arrays with f numbers ranging from f/1 to f/5 have been fabricated using a melted photoresist technique. The photoresist surface profile has been accurately reproduced in the underlying SiO2 substrate using etching techniques. Surface profile and optical performance characteristics of these microlenses are reported. Spherical microlenses are shown to have nearly diffraction-limited performance.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Avi Y. Feldblum, Casimir R. Nijander, Wesley P. Townsend, and Carlos M. Mayer-Costa "Performance and measurements of refractive microlens arrays", Proc. SPIE 1544, Miniature and Micro-Optics: Fabrication and System Applications, (1 November 1991); https://doi.org/10.1117/12.49387
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