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1 February 1992 Solid immersion lens photon tunneling microscope (Invited Paper)
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Abstract
We have demonstrated a new type of near-field microscope that uses an add-on lens, called a solid immersion lens, to a real-time Nipkow disk type of confocal scanning optical microscope. Using this microscope, a factor of two improvement in the edge response over a confocal microscope has been observed along with excellent images of a grating with 100 nm strips and spaces. This microscope operates in reflection and gives real-time images.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gordon S. Kino and Scott M. Mansfield "Solid immersion lens photon tunneling microscope (Invited Paper)", Proc. SPIE 1556, Scanning Microscopy Instrumentation, (1 February 1992); https://doi.org/10.1117/12.134882
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