Translator Disclaimer
Paper
1 December 1991 Microreflective elements for integrated planar optics interconnects
Author Affiliations +
Abstract
Binary optics reflective gratings and micro mirrors are studied for integrated planar optical interconnect applications. The staircase profile surface relief gratings have high efficiency at small diffraction angles. The micro mirrors provide larger deflection angles. Fabrication of both elements is discussed and experimented on a photoresist layer.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yunlong Sheng, Claude A. Delisle, Louis M. Moreau, Li Song, Roger A. Lessard, and Henri H. Arsenault "Microreflective elements for integrated planar optics interconnects", Proc. SPIE 1559, Photopolymer Device Physics, Chemistry, and Applications II, (1 December 1991); https://doi.org/10.1117/12.50672
PROCEEDINGS
7 PAGES


SHARE
Advertisement
Advertisement
Back to Top