Fiber optic displacement sensor for measurement of thin film thickness

Jianhua Wang

doi:10.1117/12.50063

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1 August 1991 Fiber-optic displacement sensor for measurement of thin film thickness

Jianhua Wang

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Proceedings Volume 1572, International Conference on Optical Fibre Sensors in China OFS(C) '91; (1991) https://doi.org/10.1117/12.50063
Event: International Conference on Optical Fibre Sensors in China, 1991, Wuhan, China

Abstract

The design of a reflective fiber-optic displacement sensor for the measurement of the thin film thickness is discussed in this paper. On the basis of traditional reflective fiber-optic displacement sensors, a two-measurement method for measuring the thin film thickness is proposed. Because of the improvement in design, enlargement of the measuring range and enhancement of the initial displacement enable this method to become possible in practical use. This sensor has an outstanding characteristic of being free from the effect of light interference. In performance, it has reached a measuring range of 150 micrometers , nonlinearity of 0.5%, resolution of 0.1 micrometers , stability of drift < 0.5 micrometers /hr, and initial displacement of 3 mm under the condition of no linearity correction.

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Jianhua Wang "Fiber-optic displacement sensor for measurement of thin film thickness", Proc. SPIE 1572, International Conference on Optical Fibre Sensors in China OFS(C) '91, (1 August 1991); https://doi.org/10.1117/12.50063

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