Standard for surface damage

Lionel R. Baker

doi:10.1117/12.57761

1 April 1992 Standard for surface damage

Lionel R. Baker

Proceedings Volume 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level; (1992) https://doi.org/10.1117/12.57761
Event: SIRA, 1991, London, United Kingdom

Abstract

This paper has been produced for use with the new BS4301 (1991). It describes a method for the objective measurement of surface damage such as digs and scratches on optical components. By comparison of image visibilities of defects with line and spot standards, scratches and digs can be quantified in terms of their line-equivalent widths and spot- equivalent diameters. The codes used on optical drawings are described and guidelines for surface damage thresholds are discussed. The preferred equipment to aid the various stages of inspection and measurement is described and the paper concludes with a flow diagram illustrating a typical system for the quality control of transmitting and reflecting components.

Citation Download Citation

Lionel R. Baker "Standard for surface damage", Proc. SPIE 1573, Commercial Applications of Precision Manufacturing at the Sub-Micron Level, (1 April 1992); https://doi.org/10.1117/12.57761

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KEYWORDS

Calibration

Inspection

Visibility

Microscopes

Reflection

Standards development

Optical components

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