Noise dependence of submillimeter wave Pt/GaAs Schottky diodes on interface defects and temperature

T. Suzuki

doi:10.1117/12.2297950

1 October 1991 Noise dependence of submillimeter wave Pt/GaAs Schottky diodes on interface defects and temperature

T. Suzuki

Proceedings Volume 1576, 16th International Conference on Infrared and Millimeter Waves; 15766L (1991) https://doi.org/10.1117/12.2297950
Event: 16th International Conference on Infrared and Millimeter Waves, 1991, Lausanne, Switzerland

Abstract

Fabrication processes of Pt/GaAs Schottky diodes have been studied for obtaining submillimeter wave detector/mixers with high performance. We have been studying and fabricating dot-matrix Pt/GaAs Schottky diodes which have advantages of high speed responsivity and room temperature operation. Noise characteristic of the diode is one of the important measure for the submillimeter wave detector/mixers.

The noise characteristics are influenced by defects localized near Pt/GaAs interface, which defects are introduced in processes of wet etching, chemical surface treatments, reactive ion etching and deposition of SiO₂ insulating layer. We have measured the diode noise characteristics, as the diode temperature was changed. Effects of chemical processes, composition of GaAs surface, damages by SiO₂ sputtering on the diode noise have been measured.

Citation Download Citation

T. Suzuki "Noise dependence of submillimeter wave Pt/GaAs Schottky diodes on interface defects and temperature", Proc. SPIE 1576, 16th International Conference on Infrared and Millimeter Waves, 15766L (1 October 1991); https://doi.org/10.1117/12.2297950

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