Equipment improvement methodology

Kevin Lally

doi:10.1117/12.56618

1 January 1992 Equipment improvement methodology

Kevin Lally

Proceedings Volume 1594, Process Module Metrology, Control and Clustering; (1992) https://doi.org/10.1117/12.56618
Event: Microelectronic Processing Integration, 1991, San Jose, CA, United States

Abstract

Today's advanced devices require increasing levels of process complexity. Semiconductor (SC) manufacturers are investigating higher levels of process integration using cluster tools as an approach to decrease process cycle times and increase yields.

Citation Download Citation

Kevin Lally "Equipment improvement methodology", Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); https://doi.org/10.1117/12.56618

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