Efficient laser cleaning of small particulates using pulsed laser irradiation synchronized with liquid-film deposition

Andrew C. Tam; Werner Zapka; Winfrid Ziemlich

doi:10.1117/12.51021

1 December 1991 Efficient laser cleaning of small particulates using pulsed laser irradiation synchronized with liquid-film deposition

Andrew C. Tam, Werner Zapka, Winfrid Ziemlich

Author Affiliations +

Proceedings Volume 1598, Lasers in Microelectronic Manufacturing; (1991) https://doi.org/10.1117/12.51021
Event: Microelectronic Processing Integration, 1991, San Jose, CA, United States

Abstract

Pulsed laser heating of a surface is shown to be a promising new approach for effective cleaning of small particulate contaminations. Various versions of such a technique of laser cleaning is possible, depending on where the laser irradiation is absorbed and whether a thin film is deposited on the surface to enhance the cleaning. We have observed that laser cleaning with the highest efficiency can be achieved by choosing a laser wavelength (typically ultraviolet) that is strongly absorbed by the surface, and by pulse-depositing a water film of thickness on the order of microns on the surface momentarily before the pulse laser irradiation. This permits the effective removal of particles smaller than approximately equals 20 micrometers , down to as small as 0.1 micrometers , from a solid surface, using a modest ultraviolet laser fluence of approximately equals 0.1 J/cm2.

Citation Download Citation

Andrew C. Tam, Werner Zapka, and Winfrid Ziemlich "Efficient laser cleaning of small particulates using pulsed laser irradiation synchronized with liquid-film deposition", Proc. SPIE 1598, Lasers in Microelectronic Manufacturing, (1 December 1991); https://doi.org/10.1117/12.51021

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available