Excimer laser projector for microelectronics applications

Phil T. Rumsby; Malcolm C. Gower

doi:10.1117/12.51024

1 December 1991 Excimer laser projector for microelectronics applications

Phil T. Rumsby, Malcolm C. Gower

Proceedings Volume 1598, Lasers in Microelectronic Manufacturing; (1991) https://doi.org/10.1117/12.51024
Event: Microelectronic Processing Integration, 1991, San Jose, CA, United States

Abstract

Fully integrated excimer laser mask macro and microprojectors and application workstations that produce on the workpiece illumination uniformities as low as +/-5% with overall energy throughput efficiencies of up to 70% are described.

Citation Download Citation

Phil T. Rumsby and Malcolm C. Gower "Excimer laser projector for microelectronics applications", Proc. SPIE 1598, Lasers in Microelectronic Manufacturing, (1 December 1991); https://doi.org/10.1117/12.51024

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