Evaluation of practical properties of a spin-on-glass for a shifter of phase-shift masks

Hiroyuki Miyashita; Koichi Mikami; Hisatake Sano

doi:10.1117/12.56949

1 January 1992 Evaluation of practical properties of a spin-on-glass for a shifter of phase-shift masks

Hiroyuki Miyashita, Koichi Mikami, Hisatake Sano

Proceedings Volume 1604, 11th Annual BACUS Symposium on Photomask Technology; (1992) https://doi.org/10.1117/12.56949
Event: 11th Annual BACUS Symposium on Photomask Technology, 1991, Sunnyvale, CA, United States

Abstract

Spin-on-glasses(SOGs) are excellent candidates for a shifter of phase shift masks. Four kinds of commercially available SOGs have been evaluated for use in i-line exposure. Each SOG had a high optical transmittance, and an adequate refractive index (ca. 1.44). However, only one of them, referred to as SOG: A hereafter, had enough durability against immersion in sulfuric acid for cleaning. The film cured at 200°C showed the above durability whereas that cured at 450°C did not The cause of the degradation was speculated from the FT-IR analysis. SOG:A also had (i) a low tensile stress( less than 5x108dyn/cm2 ) in its film, (ii) enough durability against scrubbing for cleaning, and (iii) good pattern profiles when fabricated by a dry-etching process. But, it had the two shortcomings; (i) poor durability against irradiation (at 200kJ/cm2) with i-line light, although this statement is based on the results of our preliminary experiment, (ii) poor step-coverage when its film was spin-coated over chrome patterns (because the thickness variation up to 20-30nm within a shifter pattern was observed). Implication of these shortcomings is discussed.

Citation Download Citation

Hiroyuki Miyashita, Koichi Mikami, and Hisatake Sano "Evaluation of practical properties of a spin-on-glass for a shifter of phase-shift masks", Proc. SPIE 1604, 11th Annual BACUS Symposium on Photomask Technology, (1 January 1992); https://doi.org/10.1117/12.56949

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