Paper
1 January 1992 Evolution of the photomask industry
A. Travis White
Author Affiliations +
Abstract
First, I want to thank Scott Landstrom and Kevin McGinnis for inviting me to speak at this eleventh (11th) Annual Symposium of BACUS. Even BACUS has evolved over the past decade, from a handful of mask shops in the Bay Area, to a worldwide symposium of mask making, associated specialty and semiconductor companies. Addressing this group and many friends is an honour and has to be more fun than addressing financial analysts in today’s market.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Travis White "Evolution of the photomask industry", Proc. SPIE 1604, 11th Annual BACUS Symposium on Photomask Technology, (1 January 1992); https://doi.org/10.1117/12.56957
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Photomasks

Inspection

Semiconductors

Mask making

Logic

Pellicles

Laser metrology

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