Improved performance of a CORE-2100 through a joint development program

Brett Schafman; Claudia H. Geller; C. Edward Franks

doi:10.1117/12.56935

1 January 1992 Improved performance of a CORE-2100 through a joint development program

Brett Schafman, Claudia H. Geller, C. Edward Franks

Author Affiliations +

Proceedings Volume 1604, 11th Annual BACUS Symposium on Photomask Technology; (1992) https://doi.org/10.1117/12.56935
Event: 11th Annual BACUS Symposium on Photomask Technology, 1991, Sunnyvale, CA, United States

Abstract

New semiconductor device technologies demand ever tighter critical dimension (CD) control in mask and reticle production. With this in mind ATEQ and Micro Mask began a joint development program that led to changes in calibration and operating parameters, and several hardware replacements on the CORE-2100. This effort led to improvements in two technology modules key to the CORE-2564 product: the rotating polygonal mirror and the steering mirror servo loop. Analysis techniques used to identify error contributors include both linewidth and placement metrology. Both CORE-2100 and CORE-2500 product generations benefit from these improvements, especially in the area of isolated and packed pitch feature uniformity.

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Brett Schafman, Claudia H. Geller, and C. Edward Franks "Improved performance of a CORE-2100 through a joint development program", Proc. SPIE 1604, 11th Annual BACUS Symposium on Photomask Technology, (1 January 1992); https://doi.org/10.1117/12.56935

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