Comparison using surface evolution theory of the smoothing and figuring of optics by plasma-assisted chemical etching and ion milling

Charles B. Zarowin

doi:10.1117/12.58038

26 March 1992 Comparison using surface evolution theory of the smoothing and figuring of optics by plasma-assisted chemical etching and ion milling

Charles B. Zarowin

Author Affiliations +

Proceedings Volume 1618, Large Optics II; (1992) https://doi.org/10.1117/12.58038
Event: Optics Rochester: SPIE's International Symposium on Imaging, Fabrication, and Competitiveness, 1991, Rochester, NY, United States

Abstract

Plasma assisted chemical etching (PACE) and ion milling (IM), originally developed for microelectronic fabrication, are now finding a new use to shape (figure) and smooth (polish) optical and other surfaces without mechanical contact. Using a recent theory of the temporal evolution of surfaces during arbitrary additive or subtractive processes, the predicted and observed smoothing of PACE and IM are critically compared in this paper to provide insight into their fundamental behavior

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Charles B. Zarowin "Comparison using surface evolution theory of the smoothing and figuring of optics by plasma-assisted chemical etching and ion milling", Proc. SPIE 1618, Large Optics II, (26 March 1992); https://doi.org/10.1117/12.58038

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