Optical properties and damage thresholds of dielectric UV/VUV coatings deposited by conventional evaporation, IAD, and IBS

Jurgen Kolbe; H. Kessler; T. Hofmann; Franz Meyer; Harald Schink; Detlev Ristau

doi:10.1117/12.60120

29 July 1992 Optical properties and damage thresholds of dielectric UV/VUV coatings deposited by conventional evaporation, IAD, and IBS

Jurgen Kolbe, H. Kessler, T. Hofmann, Franz Meyer, Harald Schink, Detlev Ristau

Author Affiliations +

Proceedings Volume 1624, Laser-Induced Damage in Optical Materials: 1991; (1992) https://doi.org/10.1117/12.60120
Event: Laser-Induced Damage in Optical Materials: 1991, 1991, Boulder, CO, United States

Abstract

Conventional evaporation as well as IAD and IBS processes were used to develop low-loss dielectric mirrors and antireflection coatings for the wavelength range 130 to 250 nm. First, single layers of SiO₂, Al₂O₃, HfO₂, AlF₃, MgF₂, LaF₃, NdF₃, and GdF₃ were deposited. The refractive indices, extinction coefficients and packing densities of the layers were determined by spectrophotometric methods in order to investigate their dependence on deposition parameters. With optimized parameters, HR and AR coatings were deposited. Their transmission and reflection coefficients were measured and compared to values calculated from single layer data and interface roughness data. Integrated scatter measurements were performed on single layers as well as AR and HR coatings for 248 nm. Results of damage threshold measurements at 193 and 248 nm are presented.

Citation Download Citation

Jurgen Kolbe, H. Kessler, T. Hofmann, Franz Meyer, Harald Schink, and Detlev Ristau "Optical properties and damage thresholds of dielectric UV/VUV coatings deposited by conventional evaporation, IAD, and IBS", Proc. SPIE 1624, Laser-Induced Damage in Optical Materials: 1991, (29 July 1992); https://doi.org/10.1117/12.60120

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