Low-energy damageless Cl2 RIBE of AlGaAs for fabricating laser diodes

Jinzhong Yu; Manabu Hamagaki; Tamio T. Hara; Yoshinobu Aoyagi; Yoshihiko Yuba; Susumu Namba

doi:10.1117/12.59162

26 June 1992 Low-energy damageless Cl₂ RIBE of AlGaAs for fabricating laser diodes

Jinzhong Yu, Manabu Hamagaki, Tamio T. Hara, Yoshinobu Aoyagi, Yoshihiko Yuba, Susumu Namba

Proceedings Volume 1634, Laser Diode Technology and Applications IV; (1992) https://doi.org/10.1117/12.59162
Event: OE/LASE '92, 1992, Los Angeles, CA, United States

Abstract

No abstract available

Citation Download Citation

Jinzhong Yu, Manabu Hamagaki, Tamio T. Hara, Yoshinobu Aoyagi, Yoshihiko Yuba, and Susumu Namba "Low-energy damageless Cl₂ RIBE of AlGaAs for fabricating laser diodes", Proc. SPIE 1634, Laser Diode Technology and Applications IV, (26 June 1992); https://doi.org/10.1117/12.59162

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available