Calibration, setup, and performance evaluation in an IC inspection     system

Byron E. Dom; Virginia H. Brecher

doi:10.1117/12.130301

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1 August 1992 Calibration, setup, and performance evaluation in an IC inspection system

Byron E. Dom, Virginia H. Brecher

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Proceedings Volume 1661, Machine Vision Applications in Character Recognition and Industrial Inspection; (1992) https://doi.org/10.1117/12.130301
Event: SPIE/IS&T 1992 Symposium on Electronic Imaging: Science and Technology, 1992, San Jose, CA, United States

Abstract

Many papers on automatic inspection systems ignore the issues of calibration, setup and performance evaluation, assuming (apparently) that they merely involve `straightforward engineering.'' In reality developing effective and robust procedures and algorithms to implement these features can be a demanding process. In fact, unbeknownst to the developers or users, the performance of many inspection systems could be significantly improved through better setup and calibration routines. In this tutorial paper we discuss both theoretical and practical issues. We start by reviewing the statistical framework underlying performance evaluation. Next we examine possible sources of inspection performance degradation. Last we describe calibration, setup and performance evaluation procedures and associated image analysis algorithms for an automated IC inspection system. While these procedures are specific to a particular system, we attempt to generalize them wherever possible.

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Byron E. Dom and Virginia H. Brecher "Calibration, setup, and performance evaluation in an IC inspection system", Proc. SPIE 1661, Machine Vision Applications in Character Recognition and Industrial Inspection, (1 August 1992); https://doi.org/10.1117/12.130301

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