Wafer pattern inspection using a Coherent Optical Processor

Xian-Yang Cai; Frank Kvasnik

doi:10.1117/12.130299

1 August 1992 Wafer pattern inspection using a Coherent Optical Processor

Xian-Yang Cai, Frank Kvasnik

Proceedings Volume 1661, Machine Vision Applications in Character Recognition and Industrial Inspection; (1992) https://doi.org/10.1117/12.130299
Event: SPIE/IS&T 1992 Symposium on Electronic Imaging: Science and Technology, 1992, San Jose, CA, United States

Abstract

Microscope coherent optical processor (M-COP) has been configured and used to inspect the micro-patterns on a silicon wafer in real time. A technique for the measurement of the scale change of this pattern has been devised. Theoretical and experimental results showing the viability of this technique are presented.

Citation Download Citation

Xian-Yang Cai and Frank Kvasnik "Wafer pattern inspection using a Coherent Optical Processor", Proc. SPIE 1661, Machine Vision Applications in Character Recognition and Industrial Inspection, (1 August 1992); https://doi.org/10.1117/12.130299

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