Implementation of two-state alignment system into CXrL aligner (Poster Paper)

Guan-Jye Chen; D. Bodoh; John P. Wallace; Paul D. Anderson; Michael T. Reilly; Ramez Nachman; Franco Cerrina

doi:10.1117/12.136049

9 July 1992 Implementation of two-state alignment system into CXrL aligner (Poster Paper)

Guan-Jye Chen, D. Bodoh, John P. Wallace, Paul D. Anderson, Michael T. Reilly, Ramez Nachman, Franco Cerrina

Proceedings Volume 1671, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II; (1992) https://doi.org/10.1117/12.136049
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

We describe the implementation of the two-state alignment system into the CXrL aligner, which is developed at our Center for X-ray Lithography. The CXrL aligner is designed to expose sub 0.25 μm feature size integrated circuits. The aligner consists of a three-axes two-state alignment system for alignment error detection and a piezo based precision mechanical stage for alignment error correction. The wafer is held by a precision vacuum chuck, while the mask is held by three vacuum suction cups located around the glass ring. In the prototype, the mask to wafer relative positioning is achieved by 3 motorized stages (for gap setting) and 3 piezo-actuators (for lateral alignment). Since the optical system is designed to be located outside of the synchrotron radiation path, alignment can be performed during exposure. We present the results of the alignment system performance, such as noise equivalent displacement and alignment signal response time. An alignment signal repeatibility of much better than 3σ = 0.07μm is achieved. We also briefly describe the future evaluation of the system, such as overlay measurement of the system using verniers and SEM inspection of some specially designed patterns.

Citation Download Citation

Guan-Jye Chen, D. Bodoh, John P. Wallace, Paul D. Anderson, Michael T. Reilly, Ramez Nachman, and Franco Cerrina "Implementation of two-state alignment system into CXrL aligner (Poster Paper)", Proc. SPIE 1671, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II, (9 July 1992); https://doi.org/10.1117/12.136049

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