Model and measurement of resist heating effect in EBL (Poster Paper)

Sergey V. Babin; Ivan Kostic; A. A. Svintsov

doi:10.1117/12.136030

9 July 1992 Model and measurement of resist heating effect in EBL (Poster Paper)

Sergey V. Babin, Ivan Kostic, A. A. Svintsov

Proceedings Volume 1671, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II; (1992) https://doi.org/10.1117/12.136030
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

Measurements of dose characteristics of PMMA were performed with various resist temperatures. The quantitative data shows sensitivity changes with the temperature increase. The model of resist heating effect is presented and a possible technique to correct distortions due to resist heating is discussed.

Citation Download Citation

Sergey V. Babin, Ivan Kostic, and A. A. Svintsov "Model and measurement of resist heating effect in EBL (Poster Paper)", Proc. SPIE 1671, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing II, (9 July 1992); https://doi.org/10.1117/12.136030

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available