Effective parameters of DESIRE process for controlling resist performance at subhalf to quarter-micron rule

Kazunori Kato; Kazuo Taira; Toshihiko Takahashi; Kenji Yanagihara

doi:10.1117/12.59741

1 June 1992 Effective parameters of DESIRE process for controlling resist performance at subhalf to quarter-micron rule

Kazunori Kato, Kazuo Taira, Toshihiko Takahashi, Kenji Yanagihara

Proceedings Volume 1672, Advances in Resist Technology and Processing IX; (1992) https://doi.org/10.1117/12.59741
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

Effective parameters of a DESIRE process on lithographic performances were studied. It is known that the silylation profile affects a resist pattern profile after development. Here, the relation between silylation profile and resist performances such as depth of focus (DOF), pattern fidelity, and resolution limit were investigated through functional analysis of exposure, cross-linking, and silylation itself. Based on this, new excimer resists were developed and remarkable large DOF and high resolution were realized. In this paper, we describe a total scheme of silylation and resist performance of novel PLASMASK resist at sub-half to quarter micron rule pattern by using the newest lithographic tools.

Citation Download Citation

Kazunori Kato, Kazuo Taira, Toshihiko Takahashi, and Kenji Yanagihara "Effective parameters of DESIRE process for controlling resist performance at subhalf to quarter-micron rule", Proc. SPIE 1672, Advances in Resist Technology and Processing IX, (1 June 1992); https://doi.org/10.1117/12.59741

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available