Design and performance of a production-worthy excimer-laser-based stepper

Christopher Sparkes; Peter A. DiSessa; David J. Elliott

doi:10.1117/12.130362

1 June 1992 Design and performance of a production-worthy excimer-laser-based stepper

, Christopher Sparkes, Peter A. DiSessa, David J. Elliott

Proceedings Volume 1674, Optical/Laser Microlithography V; (1992) https://doi.org/10.1117/12.130362
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

Excimer-laser-based steppers have matured to a production-worthy state. Widefield high-NA lenses have been developed and characterized for imaging down to 0.35 micron and below. Excimer lasers have attained practical levels of performance capability and stability, reliability, safety, and operating cost Excimer stepper system integration and control issues such as focus, exposure, and overlay stability have been addressed. Enabling support technologies - resist systems, resist processing, metrology and conventional mask making - continue to progress and are becoming available. This paper will discuss specific excimer stepper design challenges, and will present characterization data from several field installations of XLS™ deep-UV steppers configured with an advanced lens design.

Citation Download Citation

, Christopher Sparkes, Peter A. DiSessa, and David J. Elliott "Design and performance of a production-worthy excimer-laser-based stepper", Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); https://doi.org/10.1117/12.130362

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available