Strategies for deep-UV patterning of half-micron contacts using negative photoresists

Susan K. Jones; Elliott Sean Capsuto; Bruce W. Dudley; Satyendra S. Sethi; Charles R. Peters

doi:10.1117/12.130333

1 June 1992 Strategies for deep-UV patterning of half-micron contacts using negative photoresists

Susan K. Jones, Elliott Sean Capsuto, Bruce W. Dudley, Satyendra S. Sethi, Charles R. Peters

Proceedings Volume 1674, Optical/Laser Microlithography V; (1992) https://doi.org/10.1117/12.130333
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

Contact structures represent some of the most challenging features to image using deep UV excimer laser lithography. A single resist process, exposure dose, and focal setting must compensate not only for variations in the reflectivities of gate (Le, polysilicon) and diffusion (i.e., oxide) substrates, but must deal with variations in underlying topographical features which create a non-uniform resist film over a non-planar imaging surface. Commercially available deep UV photoresists are negative toned, requiring the use of clear field photomasks for imaging of submicron contact structures. In this paper, we describe three strategies for enhancing the ability to image contact structures using currently available negative toned chemically amplified deep UV photoresists: (1) optimization of central exposing laser wavelength, (2) incorporation of anti-reflective coatings, and (3) optimization of resist film thickness for sidewall profile enhancement. These approaches should also enhance imaging of contacts using positive tone photoresists, once they are commercially available

Citation Download Citation

Susan K. Jones, Elliott Sean Capsuto, Bruce W. Dudley, Satyendra S. Sethi, and Charles R. Peters "Strategies for deep-UV patterning of half-micron contacts using negative photoresists", Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); https://doi.org/10.1117/12.130333

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available