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12 August 1992 MMST development for HgCdTe FPA manufacture
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Abstract
The Microelectronics Manufacturing Science and Technology (MMST) program at Texas Instruments is developing a generic semiconductor device manufacturing technology for the mid-1990s. In-situ vacuum processing, modular cluster tool equipment, sensor-based real time process control and computer integrated manufacturing are key components of this activity. Although the program goal is to develop and demonstrate low volume, fast cycle time, cost effective silicon microelectronic manufacturing, the technology also is applicable to HgCdTe, GaAs and other materials. The extension and evolution of MMST concepts and technologies to HgCdTe focal plane array production at TI are discussed. The use of generic process modules, sensors, and energy sources are outlined and compared for silicon integrated circuit and HgCdTe FPA applications. Generic modules and those tailored to specific HgCdTe process requirements are discussed.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. D. Luttmer "MMST development for HgCdTe FPA manufacture", Proc. SPIE 1683, Infrared Focal Plane Array Producibility and Related Materials, (12 August 1992); https://doi.org/10.1117/12.137774
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