CCD modeling and design for enhanced-UV response

William G. America; Robert J. Noll; Enrique Garcia; Robert M. Dixon; Richard R. Poole; James Murphy

doi:10.1117/12.138077

28 August 1992 CCD modeling and design for enhanced-UV response

William G. America, Robert J. Noll, Enrique Garcia, Robert M. Dixon, Richard R. Poole, James Murphy

Proceedings Volume 1693, Surveillance Technologies II; (1992) https://doi.org/10.1117/12.138077
Event: Aerospace Sensing, 1992, Orlando, FL, United States

Abstract

A model of back illuminated CCDs is presented that concentrates on the fields that can exist at or near the illuminated surface. The parameters that influence these fields and how they affect the device quantum efficiency are explored. We also present a design for a thinned CCD using ion implantation and KrF excimer laser anneal that is tuned for enhanced UV response.

Citation Download Citation

William G. America, Robert J. Noll, Enrique Garcia, Robert M. Dixon, Richard R. Poole, and James Murphy "CCD modeling and design for enhanced-UV response", Proc. SPIE 1693, Surveillance Technologies II, (28 August 1992); https://doi.org/10.1117/12.138077

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