Near-infrared (1- to 3-um) InGaAs detectors and arrays: crystal growth, leakage current, and reliability

Abhay M. Joshi; Gregory H. Olsen; S. M. Mason; M. Kazakia; Vladimir S. Ban

doi:10.1117/12.140221

12 February 1993 Near-infrared (1-3 micron) InGaAs detectors and arrays - Crystal growth leakage current and reliability

Abhay M. Joshi, Gregory H. Olsen, S. M. Mason, M. Kazakia, Vladimir S. Ban

Author Affiliations +

Proceedings Volume 1715, Optical Methods in Atmospheric Chemistry; (1993) https://doi.org/10.1117/12.140221
Event: Environmental Sensing '92, 1992, Berlin, Germany

Abstract

The hydride VPE technique was used to grow In(x)Ga(1-x)As/InAs(y)P(1-y) detectors optimized for 1.8 micron (x = 0.58, y = 0.08), 2.2 microns (x = 0.71, y = 0.36), and 2.6 microns (x = 0.82, y = 0.60) using several compositional grading techniques and several doping levels in the heteroepitaxial layers. Additionally, 1.7 micron In(0.53)Ga(0.47)As detectors were grown on GaAs and Si substrates to study the possibility of fabricating a monolithic linear InGaAs array. Single element detectors with 75 and 500 micron diameter, and 256 and 512 element detector arrays of (25 x 500) micron pixel sizes were fabricated. The best results include a room temperature leakage current of 500 pA at 10 mV back bias for a 2.2 micron cutoff, (25 x 500) micron array pixel. High reliability (12,000 hours at 125 C) has been observed for both In(x)Ga(1-x)As/InAs(y)P(1-y) and graded In(0.53)Ga(0.47)As detector structures grown on GaAs and Si substrates. The relationship between dislocation density, leakage current, and reliability is also discussed.

Citation Download Citation

Abhay M. Joshi, Gregory H. Olsen, S. M. Mason, M. Kazakia, and Vladimir S. Ban "Near-infrared (1-3 micron) InGaAs detectors and arrays - Crystal growth leakage current and reliability", Proc. SPIE 1715, Optical Methods in Atmospheric Chemistry, (12 February 1993); https://doi.org/10.1117/12.140221

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available