Absolute surface measurements of processed material using two-color lasers

Hirokazu Matsumoto

doi:10.1117/12.132163

20 October 1992 Absolute surface measurements of processed material using two-color lasers

Hirokazu Matsumoto

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132163
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

In the evaluation of processed material such as metal, it is important to detect the geometrical surface of the material as well as inequalities in processing. In the case of optical evaluation, the penetration depth of light into the material is one of the most serious problems. This paper presents a method of optically evaluating the quality of processing, using ion beams, lasers, etc., with a resolution of nanometer order. The principle of the method is based on measurement of the difference between the phase changes of light reflected on the material for two colors. The optical system is composed of a two-color laser phase-locked interferometer.

Citation Download Citation

Hirokazu Matsumoto "Absolute surface measurements of processed material using two-color lasers", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132163

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