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20 October 1992 Application of a fringe scanning method to zone-plate interferometry
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Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132139
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan
Abstract
Fringe scanning for analyzing shape error of a test surface is performed by fringe shift of interference images with different phases. The method of proposed fringe shift is carried out by a zone-plate, which has fan-shaped sections of four different initial phases of 0, (pi) /4, (pi) /2, and 3(pi) /4. Experimental results agree with the theory.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Takashi Nomura, Hiroshi Miyashiro, Kazuhide Kamiya, Kazuo Yoshikawa, Hatsuzo Tashiro, Shigeo Ozono, and Masane Suzuki "Application of a fringe scanning method to zone-plate interferometry", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132139
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