Calculation of grating transmission functions by determining the spectral intensity

Xiangqun Cao; Hong Xie; Ling Chen

doi:10.1117/12.132172

20 October 1992 Calculation of grating transmission functions by determining the spectral intensity

Xiangqun Cao, Hong Xie, Ling Chen

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132172
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

In recent years more and more applications are reported for metrology grating, however, almost all the papers were limited to the testing of its accuracy, drift of dc level, and phase. As to the testing of its transmission function, nothing more than those theoretical analyses were reported. Therefore, a method for calculation of grating transmission distribution by determining its spectral intensity is described here, and the testing data and calculated results about Ronchi-gratings, sine-gratings, and their replicated gratings are theoretically analyzed and calculated. Some other problems are also discussed in this paper. With the need for technology and application of gratings, it is necessary to explore further in this field.

Citation Download Citation

Xiangqun Cao, Hong Xie, and Ling Chen "Calculation of grating transmission functions by determining the spectral intensity", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132172

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