Estimation of the size parameters of fine rectangular grooves based on Fraunhofer diffraction

Takashi Miyoshi; Yasuhiro Takaya

doi:10.1117/12.132169

20 October 1992 Estimation of the size parameters of fine rectangular grooves based on Fraunhofer diffraction

Takashi Miyoshi, Yasuhiro Takaya

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132169
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

A non-contact measuring method based on Fraunhofer diffraction which can estimate quantitatively the size parameters of fine rectangular grooves with periodic square-wave in cross section is described. The relation between a model of rectangular grooves and diffraction intensity pattern is analyzed theoretically. Equations which can estimate the size parameters of rectangular grooves such as pitch, width, and depth from the diffraction intensity pattern are derived. The numerical analysis of the equations and the computer simulations are performed. In order to verify the validity of the proposed method, the measurement of the size parameters of the rectangular grooves of a high precision grating plate is carried out.

Citation Download Citation

Takashi Miyoshi and Yasuhiro Takaya "Estimation of the size parameters of fine rectangular grooves based on Fraunhofer diffraction", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132169

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