Phase-shifting common-path interferometers using double-focus lenses for surface profiling

Hisao Kikuta; Koichi Iwata

doi:10.1117/12.132120

20 October 1992 Phase-shifting common-path interferometers using double-focus lenses for surface profiling

Hisao Kikuta, Koichi Iwata

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132120
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

Interferometers have come to be used in production processes for surface profiling. Common- path interferometers are becoming important because they are insensitive to environmental disturbances such as mechanical vibration, air turbulence, and thermal drift. Among common- path interferometers, those using double-focus lens are promising because they can easily incorporate phase-shifting technique. In this paper, common-path interferometers using double-focus lenses are described and some experimental results are given. Properties of double focus lenses are investigated and their effect on surface profiling is discussed.

Citation Download Citation

Hisao Kikuta and Koichi Iwata "Phase-shifting common-path interferometers using double-focus lenses for surface profiling", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132120

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