Direct laser doping of various materials

Valentin Craciun; Ion N. Mihailescu; G. N. Mikhailova; A. S. Seferov; Mario Bertolotti; A. Ferrari; Armando Luches; Gilberto Leggieri; Maurizio Martino

doi:10.1117/12.58657

1 April 1992 Direct laser doping of various materials

Valentin Craciun, Ion N. Mihailescu, G. N. Mikhailova, A. S. Seferov, Mario Bertolotti, A. Ferrari, Armando Luches, Gilberto Leggieri, Maurizio Martino

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Proceedings Volume 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces; (1992) https://doi.org/10.1117/12.58657
Event: LAMILADIS '91: International Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, 1991, Chernivsti, Ukraine

Abstract

Laser doping method has an attractive set of important advantages, very useful for microelectronics applications. Using this method we have obtained shallow and heavily doped p⁺ - n junctions, ohmic contacts, and interconnection lines. We have extended our laser method for Ti in-diffusion into LiNbO₃, the common technique for optical waveguides fabrication.

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Valentin Craciun, Ion N. Mihailescu, G. N. Mikhailova, A. S. Seferov, Mario Bertolotti, A. Ferrari, Armando Luches, Gilberto Leggieri, and Maurizio Martino "Direct laser doping of various materials", Proc. SPIE 1723, LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces, (1 April 1992); https://doi.org/10.1117/12.58657

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