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2 March 1993 Fabrication of 2D continuous-relief diffractive optical elements
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Proceedings Volume 1732, Holographics International '92; (1993)
Event: Holographics International '92, 1992, London, United Kingdom
Progress in the fabrication of diffractive optical elements (DOEs) as 2-dimensional continuous-relief microstructures is described. The elements are fabricated by laser-beam writing in photoresist and have typical microreliefs up to 5 micrometers and periods down to 10 micrometers . Examples include fan-out elements and Fresnel microlens arrays. The design and fabrication of a 9 X 9 fan-out DOE with a diffraction efficiency of 94% and an overall uniformity of +/- 8% is described. High quality replicas are produced by low-cost embossing and casting techniques.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael T. Gale, Markus Rossi, Helmut Schuetz, Peter Ehbets, Hans Peter Herzig, and Juan Manuel Teijido "Fabrication of 2D continuous-relief diffractive optical elements", Proc. SPIE 1732, Holographics International '92, (2 March 1993);

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