Laser beam writing of computer-generated diffractive optical components

Norbert Streibl; M. Heissmeier; Walter P. Hofmann; Ulrich W. Krackhardt; M. Schrader; Johannes Schwider; Martin Sperl

doi:10.1117/12.140457

2 March 1993 Laser beam writing of computer-generated diffractive optical components

Norbert Streibl, M. Heissmeier, Walter P. Hofmann, Ulrich W. Krackhardt, M. Schrader, Johannes Schwider, Martin Sperl

Proceedings Volume 1732, Holographics International '92; (1993) https://doi.org/10.1117/12.140457
Event: Holographics International '92, 1992, London, United Kingdom

Abstract

A new pattern generator, initially designed for ASIC fabrication, is employed for writing synthetic holograms and other micro-optical components. The specifications and some limits of this machine have been investigated. Test structures and synthetic holograms are shown. Arbitrary patterns with micron resolution, submicron positioning accuracy, large area (up to 150 X 150 mm² possible), and good quality of the microprofile were demonstrated.

Citation Download Citation

Norbert Streibl, M. Heissmeier, Walter P. Hofmann, Ulrich W. Krackhardt, M. Schrader, Johannes Schwider, and Martin Sperl "Laser beam writing of computer-generated diffractive optical components", Proc. SPIE 1732, Holographics International '92, (2 March 1993); https://doi.org/10.1117/12.140457

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