Test of holographic SiC gratings for high-power synchrotron radiation

Eiji Ishiguro; Hideki Maezawa; Makoto Sakurai; Mihiro Yanagihara; Makoto Watanabe; Masaru Koeda; Tetsuya Nagano; Kazuo Sano; Yasuhiro Akune; Kichiya Tanino

doi:10.1117/12.140515

25 February 1993 Test of holographic SiC gratings for high-power synchrotron radiation

Eiji Ishiguro, Hideki Maezawa, Makoto Sakurai, Mihiro Yanagihara, Makoto Watanabe, Masaru Koeda, Tetsuya Nagano, Kazuo Sano, Yasuhiro Akune, Kichiya Tanino

Author Affiliations +

Proceedings Volume 1739, High Heat Flux Engineering; (1993) https://doi.org/10.1117/12.140515
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

SiC laminar gratings have been fabricated by reactive ion-beam etching and holographic exposure. Diffraction efficiencies were measured in the region between 17 angstroms and 300 angstroms. The efficiency of the +1 order was 5 to 20% in this region with a small amount of scattered lights. An irradiation test for the SiC gratings was performed by using intense radiation with a power density of 2.7 W/mm² emitted from a multipole wiggler installed into the 2.5 GeV Photon Factory ring. No visible damages and no reduction of the diffraction efficiencies were observed for the uncoated SiC grating after the irradiation, while a remarkable deformation of the deposited Au layer and increase of the scattered light component were observed for the grating coated with Au. In addition to these results, some experimental results of polishability of CVD-SiC are reported.

Citation Download Citation

Eiji Ishiguro, Hideki Maezawa, Makoto Sakurai, Mihiro Yanagihara, Makoto Watanabe, Masaru Koeda, Tetsuya Nagano, Kazuo Sano, Yasuhiro Akune, and Kichiya Tanino "Test of holographic SiC gratings for high-power synchrotron radiation", Proc. SPIE 1739, High Heat Flux Engineering, (25 February 1993); https://doi.org/10.1117/12.140515

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