Paper
20 January 1993 Performance comparison of hard x-ray plates fabricated by two different methods
Wenbing Yun, Barry P. Lai, Dan G. Legnini, Y. H. Xiao, John J. Chrzas, Kenneth M. Skulina, Richard M. Bionta, V. White, Franco Cerrina
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Abstract
Two types of fabrication methods have been developed to fabricate Fresnel zone plates for focusing x-rays in the 5 - 25 keV energy region. These two fabrication methods are discussed in terms of spatial resolution and focusing efficiency, which are two important parameters that characterize the performance of a Fresnel zone plate. Experimental characterization of the zone plates fabricated by the two methods are described and the results are discussed.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wenbing Yun, Barry P. Lai, Dan G. Legnini, Y. H. Xiao, John J. Chrzas, Kenneth M. Skulina, Richard M. Bionta, V. White, and Franco Cerrina "Performance comparison of hard x-ray plates fabricated by two different methods", Proc. SPIE 1740, Optics for High-Brightness Synchrotron Radiation Beamlines, (20 January 1993); https://doi.org/10.1117/12.138694
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Cited by 10 scholarly publications.
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KEYWORDS
Zone plates

X-rays

Spatial resolution

Synchrotron radiation

Hard x-rays

Energy efficiency

Lithography

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