Optical constants from mirror reflectivities measured at synchrotrons

Richard L. Blake; Jeffrey C. Davis; T. H. Burbine; Dale E. Graessle; Eric M. Gullikson

doi:10.1117/12.140603

21 January 1993 Optical constants from mirror reflectivities measured at synchrotrons

Richard L. Blake, Jeffrey C. Davis, T. H. Burbine, Dale E. Graessle, Eric M. Gullikson

Proceedings Volume 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography; (1993) https://doi.org/10.1117/12.140603
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

Improved mirror reflectivity measurement techniques have been introduced to permit more accurate determinations of optical constants delta and beta in the complex index of refraction n = 1 - delta - i(beta) over the energy range 50 to 5000 eV. When the density has been determined by X-ray or other means, one can calculate the real and imaginary parts, f-prime and f-double prime, of the complex atomic scattering factor f = f(o) + f-prime + if-double prime from delta and beta. Preliminary results are given for the Ni LIII edge around 852 eV, and the Au M edge region from 2150 to 3500 eV. Since these are the first experimental evaluations of delta for these element edges, they are compared with appropriate reservations to semiempirical tabulations. There is much potential for this technique applied to synchrotron sources.

Citation Download Citation

Richard L. Blake, Jeffrey C. Davis, T. H. Burbine, Dale E. Graessle, and Eric M. Gullikson "Optical constants from mirror reflectivities measured at synchrotrons", Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); https://doi.org/10.1117/12.140603

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